Role of Carrier Gas and its Flow Rate to Produce Uniform, Large-Sized MoS2 Monolayer via CVD
In: IEEE 23rd International Conference on Nanotechnology (NANO); (2023-07-02) S. 490-493
Konferenz
Zugriff:
Titel: |
Role of Carrier Gas and its Flow Rate to Produce Uniform, Large-Sized MoS2 Monolayer via CVD
|
---|---|
Autor/in / Beteiligte Person: | Patel, Chandrabhan ; Dubey, Mayank ; Chaudhary, Sumit ; Kumar, Vikash ; Mukherjee, Shaibal |
Quelle: | IEEE 23rd International Conference on Nanotechnology (NANO); (2023-07-02) S. 490-493 |
Veröffentlichung: | 2023 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-3346-6 (print) |
ISSN: | 1944-9380 (print) |
DOI: | 10.1109/NANO58406.2023.10231184 |
Sonstiges: |
|