Analysis of Airgaps for OFF-State Capacitance Reduction in SOI-CMOS RF Switches
In: IEEE Transactions on Electron Devices, Jg. 70 (2023-11-01), Heft 11, S. 5814-5817
Online
academicJournal
Zugriff:
Titel: |
Analysis of Airgaps for OFF-State Capacitance Reduction in SOI-CMOS RF Switches
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Autor/in / Beteiligte Person: | Gheysens, D. ; Fleury, A. ; Monfray, S. ; Gianesello, F. ; Cathelin, P. ; Troadec, D. ; Robillard, J.F. ; Dubois, E. |
Link: | |
Zeitschrift: | IEEE Transactions on Electron Devices, Jg. 70 (2023-11-01), Heft 11, S. 5814-5817 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 0018-9383 (print) ; 1557-9646 (print) |
DOI: | 10.1109/TED.2023.3311415 |
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