A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range
In: IEEE Journal of Solid-State Circuits, Jg. 59 (2024-05-01), Heft 5, S. 1486-1496
Online
academicJournal
Zugriff:
Titel: |
A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range
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Autor/in / Beteiligte Person: | Xu, W. ; Li, Z. ; Fang, Z. ; Wang, B. ; Hong, L. ; Yang, G. ; Han, S. ; Zhao, X. ; Wang, X. |
Link: | |
Zeitschrift: | IEEE Journal of Solid-State Circuits, Jg. 59 (2024-05-01), Heft 5, S. 1486-1496 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 0018-9200 (print) ; 1558-173X (print) |
DOI: | 10.1109/JSSC.2023.3314765 |
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