Self-Aligning Optical MEMS Acoustic Sensors With nPa/√Hz Resolution
In: IEEE Sensors Journal, Jg. 24 (2024-04-15), Heft 8, S. 12066-12073
Online
academicJournal
Zugriff:
Titel: |
Self-Aligning Optical MEMS Acoustic Sensors With nPa/√Hz Resolution
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Autor/in / Beteiligte Person: | Habib Afshar, B. ; Digonnet, M.J.F. |
Link: | |
Zeitschrift: | IEEE Sensors Journal, Jg. 24 (2024-04-15), Heft 8, S. 12066-12073 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 1530-437X (print) ; 1558-1748 (print) ; 2379-9153 (print) |
DOI: | 10.1109/JSEN.2024.3362710 |
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