Toward High-Bit-Rate CMOS-MEMS Resoswitches
In: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 178-181
Konferenz
Zugriff:
Titel: |
Toward High-Bit-Rate CMOS-MEMS Resoswitches
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Autor/in / Beteiligte Person: | Lee, Cheng-Ming ; Liou, Ting-Jui ; Tsai, Chun-Pu ; Chen, Ting-Yi ; Li, Wei-Chang |
Quelle: | IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 178-181 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-5792-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS58180.2024.10439304 |
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