A Bipolar-Biased Differential CMOS-MEMS CMUT
In: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 951-954
Konferenz
Zugriff:
Titel: |
A Bipolar-Biased Differential CMOS-MEMS CMUT
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Autor/in / Beteiligte Person: | Chen, Po-Chun ; Lin, Yu-Cheng ; Chen, Hung-Yu ; Li, Sheng-Shian ; Li, Ming-Huang |
Quelle: | IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 951-954 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-5792-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS58180.2024.10439306 |
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