L-Band LiNbO3/SiO2/Sapphire Longitudinal Leaky Saw (LLSAW) Resonators with High Figure of Merit
In: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 1095-1098
Konferenz
Zugriff:
Titel: |
L-Band LiNbO3/SiO2/Sapphire Longitudinal Leaky Saw (LLSAW) Resonators with High Figure of Merit
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Autor/in / Beteiligte Person: | Lee, Zhi-Qiang ; Hsu, Tzu-Hsuan ; Tsai, Chia-Hsien ; Lin, Cheng-Chien ; Yu, Ya-Ching ; Tung, Shao-Siang ; Li, Ming-Huang |
Quelle: | IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 1095-1098 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-5792-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS58180.2024.10439333 |
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