Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies
In: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 721-724
Konferenz
Zugriff:
Titel: |
Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies
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Autor/in / Beteiligte Person: | Tseng, Chin ; Wei, Ting-Chou ; Lin, Chia-Hao ; Hu, Zih-Song ; Fang, Weileun |
Quelle: | IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 721-724 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-5792-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS58180.2024.10439460 |
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