Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing
In: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 561-564
Konferenz
Zugriff:
Titel: |
Q-Boosting Of Composite CMOS-MEMS Resonators By AC Current Low-Temperature Annealing
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Autor/in / Beteiligte Person: | Zope, Anurag A. ; Bhosale, Kalyani S. ; Li, Sheng-Shian |
Quelle: | IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS); (2024-01-21) S. 561-564 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-5792-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS58180.2024.10439520 |
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