Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor
In: Journal of Microelectromechanical Systems, Jg. 33 (2024-04-01), Heft 2, S. 274-281
Online
academicJournal
Zugriff:
Titel: |
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor
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Autor/in / Beteiligte Person: | Song, X. ; Huang, L. ; Lin, Y. ; Hong, L. ; Xu, W. |
Link: | |
Zeitschrift: | Journal of Microelectromechanical Systems, Jg. 33 (2024-04-01), Heft 2, S. 274-281 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 1057-7157 (print) ; 1941-0158 (print) |
DOI: | 10.1109/JMEMS.2024.3367380 |
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