Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images
In: IEEE Sensors Journal, Jg. 24 (2024-05-15), Heft 10, S. 15954-15966
Online
academicJournal
Zugriff:
Titel: |
Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images
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Autor/in / Beteiligte Person: | Ledesma, E. ; Uranga, A. ; Torres, F. ; Barniol, N. |
Link: | |
Zeitschrift: | IEEE Sensors Journal, Jg. 24 (2024-05-15), Heft 10, S. 15954-15966 |
Veröffentlichung: | 2024 |
Medientyp: | academicJournal |
ISSN: | 1530-437X (print) ; 1558-1748 (print) ; 2379-9153 (print) |
DOI: | 10.1109/JSEN.2024.3385911 |
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