CEO2 Slurry Post Rinse Condition Research in STI CMP Technology
In: Conference of Science and Technology for Integrated Circuits (CSTIC); (2024-03-17) S. 1-4
Konferenz
Zugriff:
Titel: |
CEO2 Slurry Post Rinse Condition Research in STI CMP Technology
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Autor/in / Beteiligte Person: | Zhang, Zhi ; Jie ; Li, Zheng ; Yi ; Wang, Hong ; Di ; Li, Jian |
Quelle: | Conference of Science and Technology for Integrated Circuits (CSTIC); (2024-03-17) S. 1-4 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-6219-0 (print) |
DOI: | 10.1109/CSTIC61820.2024.10532081 |
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