STI Gap-Filling Performance Improvement by the Process Integration Optimization in the 4XNM ETOX NOR Flash
In: Conference of Science and Technology for Integrated Circuits (CSTIC); (2024-03-17) S. 1-3
Konferenz
Zugriff:
Titel: |
STI Gap-Filling Performance Improvement by the Process Integration Optimization in the 4XNM ETOX NOR Flash
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Autor/in / Beteiligte Person: | Wang, Zhuangzhuang ; Chen, Hualun ; Gu, Lin ; Du, Yihang ; Yao, Chun ; Zhu, Zhen |
Quelle: | Conference of Science and Technology for Integrated Circuits (CSTIC); (2024-03-17) S. 1-3 |
Veröffentlichung: | 2024 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-6219-0 (print) |
DOI: | 10.1109/CSTIC61820.2024.10532114 |
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