A field point based approach for sensor conditioning in MO-CVD reactors
In: IEEE Transactions on Instrumentation and Measurement, Jg. 52 (2003-06-01), Heft 3, S. 796-803
Online
academicJournal
Zugriff:
Titel: |
A field point based approach for sensor conditioning in MO-CVD reactors
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Autor/in / Beteiligte Person: | Ando, B. ; Baeri, A. ; Fragala, I. ; Graziani, S. |
Link: | |
Zeitschrift: | IEEE Transactions on Instrumentation and Measurement, Jg. 52 (2003-06-01), Heft 3, S. 796-803 |
Veröffentlichung: | 2003 |
Medientyp: | academicJournal |
ISSN: | 0018-9456 (print) ; 1557-9662 (print) |
DOI: | 10.1109/TIM.2003.814673 |
Sonstiges: |
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