A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array
In: IEEE International Solid-State Sensors and Actuators Conference; Jg. 1 (2003) S. 320-323
Konferenz
Zugriff:
Titel: |
A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array
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Autor/in / Beteiligte Person: | Socher, E. ; Sinai, Y. ; Nemirovsky, Y. |
Quelle: | IEEE International Solid-State Sensors and Actuators Conference; Jg. 1 (2003) S. 320-323 |
Veröffentlichung: | 2003 |
Medientyp: | Konferenz |
ISBN: | 0-7803-7731-1 (print) ; 978-0-7803-7731-8 (print) |
DOI: | 10.1109/SENSOR.2003.1215317 |
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