Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method
In: Proceedings of the 2004 IEEE International Conference on Control Applications; Jg. 2 (2004) S. 1410-1414
Konferenz
Zugriff:
Titel: |
Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method
|
---|---|
Autor/in / Beteiligte Person: | Matsumoto, K. ; Suzuki, K. ; Kunimatsu, S. ; Fujii, T. |
Quelle: | Proceedings of the 2004 IEEE International Conference on Control Applications; Jg. 2 (2004) S. 1410-1414 |
Veröffentlichung: | 2004 |
Medientyp: | Konferenz |
ISBN: | 0-7803-8633-7 (print) ; 978-0-7803-8633-4 (print) |
DOI: | 10.1109/CCA.2004.1387572 |
Sonstiges: |
|