Simulation of emitter doping profiles formed by industrial POCl3 processes
In: IEEE 39th Photovoltaic Specialists Conference (PVSC); (2013-06-01) S. 1383-1388
Konferenz
Zugriff:
Titel: |
Simulation of emitter doping profiles formed by industrial POCl3 processes
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Autor/in / Beteiligte Person: | Abbott, Malcolm ; Scardera, Giuseppe ; McIntosh, Keith R. ; Meisel, Andreas |
Quelle: | IEEE 39th Photovoltaic Specialists Conference (PVSC); (2013-06-01) S. 1383-1388 |
Veröffentlichung: | 2013 |
Medientyp: | Konferenz |
ISBN: | 978-1-4799-3299-3 (print) ; 978-1-4799-3298-6 (print) |
ISSN: | 0160-8371 (print) |
DOI: | 10.1109/PVSC.2013.6744402 |
Sonstiges: |
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