Fabrication and Characterization of Capacitive RF MEMS Perforated Switch
In: IEEE Access, Jg. 6 (2018), S. 77519-77528
Online
academicJournal
Zugriff:
Titel: |
Fabrication and Characterization of Capacitive RF MEMS Perforated Switch
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Autor/in / Beteiligte Person: | Srinivasa Rao, K. ; Thalluri, L.N. ; Guha, K. ; Girija Sravani, K. |
Link: | |
Zeitschrift: | IEEE Access, Jg. 6 (2018), S. 77519-77528 |
Veröffentlichung: | 2018 |
Medientyp: | academicJournal |
ISSN: | 2169-3536 (print) |
DOI: | 10.1109/ACCESS.2018.2883353 |
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