Control System Automation of the Sputtering Device WUP -5m for the Study of Wave Propagation in Complex Media
In: XXIVth International Seminar/Workshop on Direct and Inverse Problems of Electromagnetic and Acoustic Wave Theory (DIPED); (2019-09-01) S. 122-125
Konferenz
Zugriff:
Titel: |
Control System Automation of the Sputtering Device WUP -5m for the Study of Wave Propagation in Complex Media
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Autor/in / Beteiligte Person: | Vodorez, I. S. ; Eremenko, Z. E. ; Volodchenko, A. I. ; Kulish, S.M. |
Quelle: | XXIVth International Seminar/Workshop on Direct and Inverse Problems of Electromagnetic and Acoustic Wave Theory (DIPED); (2019-09-01) S. 122-125 |
Veröffentlichung: | 2019 |
Medientyp: | Konferenz |
ISBN: | 978-1-7281-2388-2 (print) ; 978-1-7281-2389-9 (print) |
ISSN: | 2165-3593 (print) |
DOI: | 10.1109/DIPED.2019.8882605 |
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