A CNN-Based CMP Planarization Model Considering LDE Effect
In: IEEE Transactions on Components, Packaging and Manufacturing Technology, Jg. 10 (2020-04-01), Heft 4, S. 723-729
Online
academicJournal
Zugriff:
Titel: |
A CNN-Based CMP Planarization Model Considering LDE Effect
|
---|---|
Autor/in / Beteiligte Person: | Bao, H. ; Chen, L. |
Link: | |
Zeitschrift: | IEEE Transactions on Components, Packaging and Manufacturing Technology, Jg. 10 (2020-04-01), Heft 4, S. 723-729 |
Veröffentlichung: | 2020 |
Medientyp: | academicJournal |
ISSN: | 2156-3950 (print) ; 2156-3985 (print) |
DOI: | 10.1109/TCPMT.2020.2979472 |
Sonstiges: |
|