Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High Volume Applications
In: IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS); (2020) S. 147-152
Konferenz
Zugriff:
Titel: |
Low-Cost LWIR-Band CMOS Infrared (CIR) Microbolometers for High Volume Applications
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Autor/in / Beteiligte Person: | Akin, Tayfun |
Quelle: | IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS); (2020) S. 147-152 |
Veröffentlichung: | 2020 |
Medientyp: | Konferenz |
ISBN: | 978-1-7281-3581-6 (print) ; 978-1-7281-3580-9 (print) |
ISSN: | 2160-1968 (print) |
DOI: | 10.1109/MEMS46641.2020.9056383 |
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