Effect of Post Growth Annealing on Phase Transition Parameters in LP CVD Grown Vanadium Dioxide Thin Films
In: 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM); (2020-06-01) S. 28-31
Konferenz
Zugriff:
Titel: |
Effect of Post Growth Annealing on Phase Transition Parameters in LP CVD Grown Vanadium Dioxide Thin Films
|
---|---|
Autor/in / Beteiligte Person: | Kapoguzov, Kirill E. ; Mutilin, Sergey V. ; Prinz, Victor Ya. ; Yakovkina, Lyubov V. |
Quelle: | 21st International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM); (2020-06-01) S. 28-31 |
Veröffentlichung: | 2020 |
Medientyp: | Konferenz |
ISBN: | 978-1-7281-6846-3 (print) ; 978-1-7281-6845-6 (print) |
ISSN: | 2325-419X (print) |
DOI: | 10.1109/EDM49804.2020.9153343 |
Sonstiges: |
|