HNA Wet Etching Optimization in Wafer Thinning of BSI Process
In: China Semiconductor Technology International Conference (CSTIC); (2021-03-14) S. 1-4
Konferenz
Zugriff:
Titel: |
HNA Wet Etching Optimization in Wafer Thinning of BSI Process
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Autor/in / Beteiligte Person: | Lyu, Pengfei ; Xiang, Mingyuan ; Xu, Jia ; Zhang, Tianhao ; Zhang, Quan ; Zhao, Qingpeng |
Quelle: | China Semiconductor Technology International Conference (CSTIC); (2021-03-14) S. 1-4 |
Veröffentlichung: | 2021 |
Medientyp: | Konferenz |
ISBN: | 978-1-6654-4945-8 (print) ; 978-1-6654-4944-1 (print) |
DOI: | 10.1109/CSTIC52283.2021.9461419 |
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