Replacement of Waveguides by a Resonant Cavity in a Microwave CVD Reactor
In: IEEE Transactions on Plasma Science, Jg. 49 (2021-09-01), Heft 9, S. 2718-2721
Online
academicJournal
Zugriff:
Titel: |
Replacement of Waveguides by a Resonant Cavity in a Microwave CVD Reactor
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Autor/in / Beteiligte Person: | Isoldi, M. ; Ozono, E.M. ; Mansano, R.D. |
Link: | |
Zeitschrift: | IEEE Transactions on Plasma Science, Jg. 49 (2021-09-01), Heft 9, S. 2718-2721 |
Veröffentlichung: | 2021 |
Medientyp: | academicJournal |
ISSN: | 0093-3813 (print) ; 1939-9375 (print) |
DOI: | 10.1109/TPS.2021.3104748 |
Sonstiges: |
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