A copper CMOS-MEMS Z-axis gyroscope
In: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems; (2002) S. 631-634
Konferenz
Zugriff:
Titel: |
A copper CMOS-MEMS Z-axis gyroscope
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Autor/in / Beteiligte Person: | Luo, Hao ; Zhu, Xu ; Lakdawala, H. ; Carley, L.R. ; Fedder, G.K. |
Quelle: | Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems; (2002) S. 631-634 |
Veröffentlichung: | 2002 |
Medientyp: | Konferenz |
ISBN: | 0-7803-7185-2 (print) ; 978-0-7803-7185-9 (print) |
ISSN: | 1084-6999 (print) |
DOI: | 10.1109/MEMSYS.2002.984350 |
Sonstiges: |
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