The Performance Enhancement of Polysilicon Microbolometer in Standard CMOS Technology with Si3N4 Film
In: IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT); (2022-10-25) S. 1-3
Konferenz
Zugriff:
Titel: |
The Performance Enhancement of Polysilicon Microbolometer in Standard CMOS Technology with Si3N4 Film
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Autor/in / Beteiligte Person: | Guo, Yao-Zu ; Ma, Hao-Lan ; Xu, Sheng ; Zhu, Wei ; Ji, Xiao-Li |
Quelle: | IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT); (2022-10-25) S. 1-3 |
Veröffentlichung: | 2022 |
Medientyp: | Konferenz |
ISBN: | 978-1-6654-6906-7 (print) |
DOI: | 10.1109/ICSICT55466.2022.9963299 |
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