MICROCRYSTALLINE AND AMORPHOUS SILICON PREPARED BY LOW PRESSURE PLASMA CVD
In: Synthesis, Crystal Growth and Characterization, 1982, S. 87-92
Buch
Zugriff:
Titel: |
MICROCRYSTALLINE AND AMORPHOUS SILICON PREPARED BY LOW PRESSURE PLASMA CVD
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Autor/in / Beteiligte Person: | IQBAL, Z. |
Zeitschrift: | Synthesis, Crystal Growth and Characterization, 1982, S. 87-92 |
Quelle: | Synthesis, Crystal Growth and Characterization; (1982) S. 87-92 |
Veröffentlichung: | 1982 |
Medientyp: | Buch |
ISBN: | 978-0-444-86435-2 (print) ; 978-0-08-097852-9 (print) ; 978-0-08-098469-8 (print) ; 0-444-86435-0 (print) ; 0-08-097852-5 (print) ; 0-08-098469-X (print) |
DOI: | 10.1016/B978-0-444-86435-2.50009-1 |
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