Finite element simulation-based prediction of CMOS-compatible pyroelectric material in MEMS IR detectors
In: Microelectronics Reliability, Jg. 147 (2023-08-01)
academicJournal
Zugriff:
Titel: |
Finite element simulation-based prediction of CMOS-compatible pyroelectric material in MEMS IR detectors
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Autor/in / Beteiligte Person: | Ranu ; Agarwal, Pankaj B. |
Link: | |
Zeitschrift: | Microelectronics Reliability, Jg. 147 (2023-08-01) |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 0026-2714 (electronic) |
DOI: | 10.1016/j.microrel.2023.115076 |
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