Correlation of optical and photoluminescence properties in amorphous SiN x:H thin films deposited by PECVD or UVCVD
In: Thin Solid Films, Jg. 511 (2006), S. 103-107
academicJournal
Zugriff:
Titel: |
Correlation of optical and photoluminescence properties in amorphous SiN x:H thin films deposited by PECVD or UVCVD
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Autor/in / Beteiligte Person: | Lelièvre, J. F. ; De la Torre, J. ; Kaminski, A. ; Bremond, G. ; Lemiti, M. ; El Bouayadi, Rachid ; Araujo, Daniel ; Epicier, Thierry ; Monna, R. ; Pirot, M. ; Ribeyron, P. J. ; Jaussaud, C. |
Link: | |
Zeitschrift: | Thin Solid Films, Jg. 511 (2006), S. 103-107 |
Veröffentlichung: | 2006 |
Medientyp: | academicJournal |
ISSN: | 0040-6090 (electronic) |
DOI: | 10.1016/j.tsf.2005.12.136 |
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