Atomic layer deposition of CdO and CdxZn1−xO films
In: Materials Chemistry and Physics, Jg. 140 (2013-07-15), Heft 2-3, S. 465-471
academicJournal
Zugriff:
Titel: |
Atomic layer deposition of CdO and CdxZn1−xO films
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Autor/in / Beteiligte Person: | Bakke, Jonathan R. ; Hägglund, Carl ; Jung, Hee Joon ; Sinclair, Robert ; Bent, Stacey F. |
Link: | |
Zeitschrift: | Materials Chemistry and Physics, Jg. 140 (2013-07-15), Heft 2-3, S. 465-471 |
Veröffentlichung: | 2013 |
Medientyp: | academicJournal |
ISSN: | 0254-0584 (electronic) |
DOI: | 10.1016/j.matchemphys.2013.03.038 |
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