Comparative study of LNO, LSCO and LSMO as electrode layers for microelectronic capacitors by dynamic SIMS
In: Surface & Coatings Technology, Jg. 150 (2002), Heft 2, S. 119-124
academicJournal
Zugriff:
Titel: |
Comparative study of LNO, LSCO and LSMO as electrode layers for microelectronic capacitors by dynamic SIMS
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Autor/in / Beteiligte Person: | Pollak, C ; Reichmann, K ; Hutter, H |
Link: | |
Zeitschrift: | Surface & Coatings Technology, Jg. 150 (2002), Heft 2, S. 119-124 |
Veröffentlichung: | 2002 |
Medientyp: | academicJournal |
ISSN: | 0257-8972 (electronic) |
DOI: | 10.1016/S0257-8972(01)01498-0 |
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