Variation of thin film deposition rate on SS 314 with the variation of gas flow rate using CVD
In: Industrial Lubrication and Tribology, Jg. 63 (2011-09-27), Heft 6, S. 433-439
Online
academicJournal
Zugriff:
Titel: |
Variation of thin film deposition rate on SS 314 with the variation of gas flow rate using CVD
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Autor/in / Beteiligte Person: | Asaduzzaman Chowdhury, Mohammad ; Muhammad Nuruzzaman, Dewan ; Md.. Khalil, Khaled ; Lutfar Rahaman, Mohammad |
Link: | |
Zeitschrift: | Industrial Lubrication and Tribology, Jg. 63 (2011-09-27), Heft 6, S. 433-439 |
Veröffentlichung: | 2011 |
Medientyp: | academicJournal |
ISSN: | 0036-8792 (print) |
DOI: | 10.1108/00368791111169016 |
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