Biased Double Arc Plasma CVD법에 의한 초경합금의 TiN 증착에 관한 연구 : A Study on the Chemical Vapour Deposition of TiN Coating on Cemented Carbides by Biased Double Arc Plasma
In: 한국기계기술학회지, Jg. 1 (1999-12-31), Heft 1, S. 39-45
academicJournal
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Titel: |
Biased Double Arc Plasma CVD법에 의한 초경합금의 TiN 증착에 관한 연구 : A Study on the Chemical Vapour Deposition of TiN Coating on Cemented Carbides by Biased Double Arc Plasma
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Autor/in / Beteiligte Person: | 양영호 ; Yeong-Ho, Yang |
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Zeitschrift: | 한국기계기술학회지, Jg. 1 (1999-12-31), Heft 1, S. 39-45 |
Veröffentlichung: | 1999 |
Medientyp: | academicJournal |
ISSN: | 1229-604X (print) |
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