Physical and electrical characterization of high-k ZrO.sub.2 metal-insulator-metal capacitor
In: Thin Solid Films, Jg. 516 (2008-10-01), Heft 23, S. 8333-8336
academicJournal
Zugriff:
Titel: |
Physical and electrical characterization of high-k ZrO.sub.2 metal-insulator-metal capacitor
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Autor/in / Beteiligte Person: | Kim, Joo-Hyung ; Ignatova, Velislava ; Kucher, Peter ; Heitmann, Johannes ; Oberbeck, Lars ; Schroder, Uwe |
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Zeitschrift: | Thin Solid Films, Jg. 516 (2008-10-01), Heft 23, S. 8333-8336 |
Veröffentlichung: | 2008 |
Medientyp: | academicJournal |
ISSN: | 0040-6090 (print) |
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