Development of a thermoelectric energy harvester with thermal isolation cavity by standard CMOS process
In: Sensors & Actuators: A. Physical, Jg. 153 (2009-08-03), Heft 2, S. 244-250
academicJournal
Zugriff:
Titel: |
Development of a thermoelectric energy harvester with thermal isolation cavity by standard CMOS process
|
---|---|
Autor/in / Beteiligte Person: | Yang, S.M. ; Lee, T. ; Jeng, C.A. |
Link: | |
Zeitschrift: | Sensors & Actuators: A. Physical, Jg. 153 (2009-08-03), Heft 2, S. 244-250 |
Veröffentlichung: | 2009 |
Medientyp: | academicJournal |
ISSN: | 0924-4247 (print) |
Sonstiges: |
|