Researchers from SUMCO Corporation Discuss Findings in Chemicals and Chemistry (Hydrogen Termination Effect On Sio2/si Interface State Density In Ch3o-molecular-ion-implanted Silicon Epitaxial Wafer for Cmos
In: Chemicals & Chemistry, 2024-03-01, S. 4258
Zeitungsartikel
Zugriff:
Titel: |
Researchers from SUMCO Corporation Discuss Findings in Chemicals and Chemistry (Hydrogen Termination Effect On Sio2/si Interface State Density In Ch3o-molecular-ion-implanted Silicon Epitaxial Wafer for Cmos
|
---|---|
Zeitschrift: | Chemicals & Chemistry, 2024-03-01, S. 4258 |
Veröffentlichung: | 2024 |
Medientyp: | Zeitungsartikel |
ISSN: | 1944-1517 (print) |
Sonstiges: |
|