Mechanical and Structural Behaviors of HfN Thin Films Fabricated by Direct Current and Mid-frequency Magnetron Sputtering
In: Corrosion Science and Technology, Jg. 22 (2023), Heft 1, S. 30-35
academicJournal
Zugriff:
Titel: |
Mechanical and Structural Behaviors of HfN Thin Films Fabricated by Direct Current and Mid-frequency Magnetron Sputtering
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Autor/in / Beteiligte Person: | Chun, Sung-yong |
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Zeitschrift: | Corrosion Science and Technology, Jg. 22 (2023), Heft 1, S. 30-35 |
Veröffentlichung: | 2023 |
Medientyp: | academicJournal |
ISSN: | 1598-6462 (print) |
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