8.4 Gas-Phase Reactions in CVD
In: ASM Handbook, Volume 22A - Fundamentals of Modeling for Metals Processing 2009; (2009)
Online
E-Book
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Zugriff:
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8.4 Gas-Phase Reactions in CVD
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Autor/in / Beteiligte Person: | D.U., Furrer ; S.L., Semiatin |
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Quelle: | ASM Handbook, Volume 22A - Fundamentals of Modeling for Metals Processing 2009; (2009) |
Veröffentlichung: | 2009 |
Medientyp: | E-Book |
ISBN: | 978-1-61503-122-1 (print) ; 978-1-61503-001-9 (print) |
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