Characterization of an Oxidized Porous Silicon Layer by Complex Process Using RTO and the Fabrication of CPW-Type Stubs on an OPSL for RF Application
In: 26, Jg. 26 (2004-02-04), Heft 4, S. 315-320
Online
academicJournal
Zugriff:
Titel: |
Characterization of an Oxidized Porous Silicon Layer by Complex Process Using RTO and the Fabrication of CPW-Type Stubs on an OPSL for RF Application
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Autor/in / Beteiligte Person: | Park, Jeong-Yong ; Lee, Jong-Hyun |
Link: | |
Zeitschrift: | 26, Jg. 26 (2004-02-04), Heft 4, S. 315-320 |
Veröffentlichung: | 2004 |
Medientyp: | academicJournal |
ISSN: | 1225-6463 (print) |
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