Fabrication and Characterization of Ultrasonic Sensor Using Multilayer PZT Thin Films on Si Substrate
1999
Hochschulschrift
Zugriff:
87
The main object of this thesis concentration on the research of multilayer PZT thin film ultrasonic sensor. The multilayer structure is Pt/PZT/LNO/Pt/PZT/LNO/Pt/PZT/LNO/Pt/Ti/SiO2/Si, all of thin films were prepared by the radio frequency sputtering system. During suitable annealing process, both the LNO and PZT thin film exhibited the highly (110)-orientation perovskite structure. The crystalline of multilayer PZT thin film structure are analyzed by the XRD, the surface morphology and cross-section are analyzed by the SEM, element depth profile was observed by SIMS in order to investigated the performance of LNO/Pt bilayer thin film electrode used to multilayer PZT thin film ultrasonic sensor. In this experiment, we employ different annealing temperature, annealing times, deposition temperature, XRD analysis, FWHM analysis, orientation analysis, and resistivity of LNO/Pt bilayer. Then we can found the better fabricated conditions for prepared LNO/Pt bilayer is the LNO thin film deposition substrate temperature is 100oC, annealing temperature is 700oC for 15 minutes. And the PZT thin film prepared on the LNO/Pt bilayer which the better fabrication conditions are substrate temperature is 350oC, annealing temperature is 700oC for annealing time 15 minutes. The best properties is dielectric constant is 1240, dielectric loss 0.4, remanant polarization is about 23.6 uC/cm2, coercive field is about 83.3 KV/cm, piezoelectric constant d33 is 111 pC/N, d31 is —87 pC/N, and the life time can be extend to 1.8×1010 cycles in 100 KHz sine wave switch cycle. For the multilayer PZT thin film ultrasonic sensor, when we apply to underwater test, the receiving sensitivity is more apparently than transmitting sensitivity and the fabricated ultrasonic sensor exhibits the maximum transmitting sensitivity and receiving sensitivity is about 92 dB uPa per 1V and —231 dB re 1V/uPa at 4.2 MHz better than single layer PZT thin film ultrasonic sensor. The acoustic field analysis show the multilayer PZT thin film ultrasonic sensor has better properties than single layer PZT thin film ultrasonic sensor also. In ultra-low frequency underwater, we also had discussed .
Titel: |
Fabrication and Characterization of Ultrasonic Sensor Using Multilayer PZT Thin Films on Si Substrate
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Autor/in / Beteiligte Person: | Z.D.Lin ; 林宗德 |
Link: | |
Veröffentlichung: | 1999 |
Medientyp: | Hochschulschrift |
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