Particle Trapping and Impedance Measurement Using Bilayer Electrodes Integrated with Microcavity Structure
2014
Hochschulschrift
Zugriff:
102
With steady development of the processing techniques for Mi-cro-Electro-Mechanical System (MEMS), microfluidic chips have rapidly grown in the past 10 years. Microfluidic chips have the advantages of mass production, miniaturization, and low cost. Compared to conventional devices, these chips are more efficient to be operated. This study presented the capability of particle trapping and impedance measurement with the microcavity configuration. Carbon dioxide (CO2) laser and electroplating techniques were used to fabricate the microcavity structure which can capture 15 μm particles and perform impedance measurement. Electroplating is used to fabricate two layers of measurement electrodes on the both sides of the microcavity. This method also can make bottom electrode spread into the microcavity to increase measurement accuracy and shrink the exit aperture to around 10 μm for particle trapping. Electrical impedance spectroscopy (EIS) technique was used to analyze the electrical properties of different objects under measurement. The experimental results show that this device can distinguish different solutions with different concentration, capture particles successfully, and tell apart the difference of impedance between particle and PBS solution. Therefore, this device might have the potential to be applied in biological detection in the future.
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Particle Trapping and Impedance Measurement Using Bilayer Electrodes Integrated with Microcavity Structure
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Autor/in / Beteiligte Person: | Guan-TingChen ; 陳冠廷 |
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Veröffentlichung: | 2014 |
Medientyp: | Hochschulschrift |
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