A CMOS-MEMS Mode-Localized Resonator Based on a Tuned-Mass-Damper Structure for Mass Sensing Applications
2019
Hochschulschrift
Zugriff:
107
In this research, CMOS-MEMS 0.35-μm process platform is used to design the mode-localized resonator as a mass sensor. This research also uses the tuned mass damper design to couple a doubly clamped beam resonator and a cantilever resonator. The mode-coupling achieves mode-localization which has greater sensitivity than a single resonator as the application of mass sensors. The component sensing quality method is to measure the mass variation of the resonant frequency shift and the amplitude change in frequency response. This research also establishes a mathematical model to describe the change in mass with the eigenvalue analytical solution, the finite element simulation analysis, and the state space system method. The purpose is to investigate the measurable physical quantities such as frequency shifting and amplitude change, discuss the relation of frequency and amplitude with the cantilever position, numbers, and length design. In this research, the reliability of the predicted mathematical model was verified by measuring the frequency response of different lengths of cantilever beams. As a quantification method is to reduce mass from cantilever tips by laser cutting. This method provides a way to measure the removed mass by Scanning Electron Microscope (SEM), and the measurement results are compared with the error of the simulation results. Finally, the experiment method uses incense smoke on the mass sensor to increase the tiny mass to verify the mode-localized beam has higher sensitivity than the doubly clamped beam.
Titel: |
A CMOS-MEMS Mode-Localized Resonator Based on a Tuned-Mass-Damper Structure for Mass Sensing Applications
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Autor/in / Beteiligte Person: | Du, Wun-Ruei ; 杜文睿 |
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Veröffentlichung: | 2019 |
Medientyp: | Hochschulschrift |
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