A capacitive membrane MEMS microwave power sensor in the X-band based on GaAs MMIC technology
In: 半导体学报 / Chinese Journal of Semiconductors, 2009, Heft 5, S. 43-46
Online
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Zugriff:
Titel: |
A capacitive membrane MEMS microwave power sensor in the X-band based on GaAs MMIC technology
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Zeitschrift: | 半导体学报 / Chinese Journal of Semiconductors, 2009, Heft 5, S. 43-46 |
Veröffentlichung: | 2009 |
Medientyp: | academicJournal |
ISSN: | 0253-4177 (print) |
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