极高真空校准室内残余气体的成分分析 / Composition Analysis of Residual Gases in Extremely High Vacuum Calibration Chamber
In: 真空科学与技术 / Vacuum Science and Technology, 2010, Heft 1, S. 54-59
academicJournal
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Titel: |
极高真空校准室内残余气体的成分分析 / Composition Analysis of Residual Gases in Extremely High Vacuum Calibration Chamber
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Zeitschrift: | 真空科学与技术 / Vacuum Science and Technology, 2010, Heft 1, S. 54-59 |
Veröffentlichung: | 2010 |
Medientyp: | academicJournal |
ISSN: | 0253-9748 (print) |
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