CVD金刚石膜高效超精密抛光技术 / High-Productivity Ultraprecise Polishing Technique of CVD Diamond Film
In: 纳米技术与精密工程 / Nanotechnology and Precision Engineering, 2011, Heft 5, S. 451-458
academicJournal
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CVD金刚石膜高效超精密抛光技术 / High-Productivity Ultraprecise Polishing Technique of CVD Diamond Film
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Zeitschrift: | 纳米技术与精密工程 / Nanotechnology and Precision Engineering, 2011, Heft 5, S. 451-458 |
Veröffentlichung: | 2011 |
Medientyp: | academicJournal |
ISSN: | 1672-6030 (print) |
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