低阻硅CMOS工艺片上互连线模型 / Model of On-chip Interconnect Line in Low-resistance Si CMOS Substrate
In: 压电与声光 / Piezoelectrics & Acoustooptics, 2011, Heft 3, S. 486-489
academicJournal
Zugriff:
Titel: |
低阻硅CMOS工艺片上互连线模型 / Model of On-chip Interconnect Line in Low-resistance Si CMOS Substrate
|
---|---|
Link: | |
Zeitschrift: | 压电与声光 / Piezoelectrics & Acoustooptics, 2011, Heft 3, S. 486-489 |
Veröffentlichung: | 2011 |
Medientyp: | academicJournal |
ISSN: | 1004-2474 (print) |
Sonstiges: |
|