FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si(1 0 0)
In: Ultrasonics, Jg. 54 (2014), Heft 1, S. 291-292
Online
academicJournal
Titel: |
FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si(1 0 0)
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Autor/in / Beteiligte Person: | Kaletta, Udo Christian ; Wenger, Christian |
Link: | |
Zeitschrift: | Ultrasonics, Jg. 54 (2014), Heft 1, S. 291-292 |
Veröffentlichung: | 2014 |
Medientyp: | academicJournal |
ISSN: | 0041-624X (print) |
DOI: | 10.1016/j.ultras.2013.04.009 |
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