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MULTI-AXIS ACTUATING APPARATUS

Hwu, En-Te ; Hwang, Ing-Shouh
2012
Online Patent

Titel:
MULTI-AXIS ACTUATING APPARATUS
Autor/in / Beteiligte Person: Hwu, En-Te ; Hwang, Ing-Shouh
Link:
Veröffentlichung: 2012
Medientyp: Patent
Sonstiges:
  • Nachgewiesen in: USPTO Patent Applications
  • Sprachen: English
  • Document Number: 20120306317
  • Publication Date: December 6, 2012
  • Appl. No: 13/252842
  • Application Filed: October 04, 2011
  • Assignees: Academia Sinica (Taipei, TW)
  • Claim: 1. A multi-axis actuating apparatus for a positioning apparatus comprising: a movable element; a platform attached to the movable element; a plurality of driving elements frictionally engaging the movable element and configured to selectively move the movable element along a first direction; and a plurality of actuators that move the plurality of driving elements when driving signals are applied to the plurality of actuators, wherein different driving signals are applied to the plurality of actuators to cause different movement of the driving elements such that the movable element has different displacements along the plurality of driving elements and are titled due to the different displacement.
  • Claim: 2. The multi-axis actuating apparatus of claim 1, wherein the plurality of driving elements are guiding rods extending along the first direction.
  • Claim: 3. The multi-axis actuating apparatus of claim 2, wherein the first direction is Z axis.
  • Claim: 4. The multi-axis actuating apparatus of claim 1, wherein the plurality of driving elements include a first, a second, a third and a fourth guiding rods extending along Z axis.
  • Claim: 5. The multi-axis actuating apparatus of claim 4, wherein the first and second guiding rods are aligned along X axis and the third and fourth guiding rods aligned along Y axis.
  • Claim: 6. The multi-axis actuating apparatus of claim 5, wherein the movable element has an angular movement on an X-Z plane when the first and second guiding rods are actuated differently.
  • Claim: 7. The multi-axis actuating apparatus of claim 6, wherein the platform has a linear movement along the X axis when the movable element has the angular movement on the X-Z plane.
  • Claim: 8. The multi-axis actuating apparatus of claim 5, wherein the movable element has an angular movement on a Y-Z plane when the third and fourth guiding rods are actuated differently.
  • Claim: 9. The multi-axis actuating apparatus of claim 1, further comprising a preload element surrounding the plurality of driving elements to maintain frictional engagement between the plurality of driving elements and the movable element.
  • Claim: 10. The multi-axis actuating apparatus of claim 1, wherein the plurality of actuators are disposed on a same housing.
  • Claim: 11. The multi-axis actuating apparatus of claim 1, wherein the plurality of actuators include a first actuator for moving a first set of the driving elements along X axis, a second actuator for moving a second set of the driving elements along Y axis, and a third set of the driving elements along Z axis.
  • Claim: 12. The multi-axis actuating apparatus of claim 11, further comprising a first connection plate, a second connection plate, and a third connection plate, which connect the first, second, and third set of the driving elements to the first, second, and third actuators, respectively.
  • Claim: 13. The multi-axis actuating apparatus of claim 12, wherein the movable element has a first surface, a second surface and a third surface that are perpendicular to one another, wherein the first, second, and third set of the driving elements frictionally engage the first, second and third surfaces, respectively.
  • Claim: 14. The multi-axis actuating apparatus of claim 12, wherein the first, second and third set of driving elements each include four guiding rods.
  • Claim: 15. The multi-axis actuating apparatus of claim 13, further comprising a fourth actuator, a fourth set of driving elements.
  • Claim: 16. The multi-axis actuating apparatus of claim 15, wherein the fourth actuator is juxtaposed with one of the first, second, and third actuators.
  • Claim: 17. The multi-axis actuating apparatus of claim 16, wherein the fourth actuator and the one of the first, second and third actuators are actuated differently to cause tilt or rotation of the moveable element.
  • Claim: 18. The multi-axis actuating apparatus of claim 1, wherein the plurality of actuators include piezoelectric materials or magnetic linear motors.
  • Claim: 19. The multi-axis actuating apparatus of claim 1, wherein the movable element has plurality of guiding grooves for guiding movement of the plurality of driving element.
  • Claim: 20. The multi-axis actuating apparatus of claim 2, wherein the guiding rods have high axial stiffness that are made of carbon fiber or composites or metal alloy material.
  • Claim: 21. The multi-axis actuating apparatus of claim 1, wherein the plurality of actuators include first and second actuators for moving first and second sets of the driving elements along X axis, third and forth actuator for moving third and forth sets of the driving elements along Y axis, and fifth and sixth actuators for moving fifth and sixth sets of the driving elements along Z axis.
  • Claim: 22. The multi-axis actuating apparatus of claim 21, wherein the movable element has X,Y,Z linear movements along X,Y,Z axes and θX, θY, θZ angular movements when the first, second, third, forth, fifth and sixth sets of driving elements are actuated differently.
  • Claim: 23. A multi-axis actuating apparatus comprising: a movable element defining a first guiding groove and a second guiding groove; a platform secured to the platform; a first guiding rod frictionally engaging the first guiding groove; a second guiding rod frictionally engaging the second guiding groove; a first actuator connected to the first guiding rod for moving the first guiding rod when the first actuator is actuated; a second actuator connected to the second guiding rod for moving the second guiding rod when the second actuator is actuated; and a housing that supports the first and second actuators, wherein the first and second actuators are actuated differently to cause different displacement of the first and second guiding grooves, such that the movable element is titled.
  • Current U.S. Class: 31032/317
  • Current International Class: 01

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