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This disclosure provides a method for preparing a CIGS thin film solar cell, including placing a substrate formed with a barrier layer into a sputtering chamber, and forming a doping layer on the barrier layer by sputtering, wherein the doping layer is sodium doped a hetero-molybdenum layer; detecting sodium ion content, and introducing water vapor into the sputtering chamber according to the sodium ion content when the doping layer is formed by sputtering. The method for preparing the CIGS thin film solar cell of the present disclosure introduces water vapor into the sputtering chamber according to the content of sodium ions. The water vapor may ensure the stability after sodium ion sputtering, and the content of water vapor is adjusted according to the sodium ion content.

Titel:	METHODS FOR PREPARING CIGS THIN FILM SOLAR CELL
Link:	View record in USPTO Patent Applications (Volltext)
Veröffentlichung:	2019
Medientyp:	Patent
Sonstiges:	Nachgewiesen in: USPTO Patent Applications Sprachen: English Document Number: 20190189814 Publication Date: June 20, 2019 Appl. No: 16/217041 Application Filed: December 11, 2018 Assignees: Miasolé Equipment Integration (Fujian) Co., Ltd. (Fujian, CN) Claim: 1. A method for preparing a CIGS thin film solar cell, comprising: placing a substrate formed with a barrier layer in a sputtering chamber, and forming a doping layer on the barrier layer by sputtering, wherein the doping layer is a sodium doped molybdenum layer; detecting a sodium ion content and introducing water vapor into the sputtering chamber according to the sodium ion content when the doping layer is formed by sputtering. Claim: 2. The method according to claim 1, wherein the sodium ion content is detected and the water vapor is introduced into the sputtering chamber according to the sodium ion content, comprising: presetting a minimum threshold A of the sodium ion content, and introducing the water vapor into the sputtering chamber when a sputtering time is longer than or equal to a buffering time T, and when the sodium ion content is detected less than the minimum threshold A. Claim: 3. The method according to claim 1, wherein the sodium ion content is detected and the water vapor is introduced into the sputtering chamber according to the sodium ion content, comprising: presetting a minimum threshold A of the sodium ion content, detecting the sodium ion content in real time, and introducing the water vapor into the sputtering chamber when the sodium ion content is detected less than the minimum threshold A. Claim: 4. The method according to claim 1, wherein an amount of the water vapor introduced into the sputtering chamber is nonlinearly and inversely proportional to the sodium ion content. Claim: 5. The method according to claim 2, wherein an amount of the water vapor introduced into the sputtering chamber is nonlinearly and inversely proportional to the sodium ion content. Claim: 6. The method according to claim 3, wherein an amount of the water vapor introduced into the sputtering chamber is nonlinearly and inversely proportional to the sodium ion content. Claim: 7. The method according to claim 1, wherein the sputtering chamber is filled with an inert gas, further comprising: detecting amount of hydrogen ions of the water vapor and =amount of the inert gas ions in the sputtering chamber; stopping introduction of the water vapor when the ratio of the detected amount of hydrogen ions in the water vapor to the detected amount of inert gas exceeds a preset standard ratio threshold. Claim: 8. The method according to claim 5, wherein the preset standard ratio threshold is 0.1 to 0.4. Claim: 9. The method according to claim 2, wherein the minimum threshold A is 71019/cm3 to 7.51019/cm3, and the buffering time T is 5 min to 15 min. Claim: 10. The method according to claim 5, wherein the inert gas is argon. Claim: 11. The method according to claim 1, further comprising: forming subsequent layers on the doping layer after forming the doping layer by sputtering; wherein the subsequent layers comprise in turn a molybdenum layer, an absorption layer, a first buffer layer, a second buffer layer, and a window layer. Claim: 12. The method according to claim 9, wherein the absorbing layer is a mixed layer of copper, indium, gallium, and selenium; the first buffer layer is a cadmium sulfide layer, the second buffer layer is a different zinc oxide layer, and the window layer is an aluminum-doped zinc oxide layer. Current International Class: 01; 01

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METHODS FOR PREPARING CIGS THIN FILM SOLAR CELL