HETERODYNING OPTICAL PHASE MEASURING DEVICE FOR DIFFRACTION BASED OVERLAY
2023
Online
Patent
Methods and systems are provided for diffraction-based overlay (DBO) metrology of a multilayered sample. In one example, a method may include generating spatially structured light via a light source and an optical modulator, transmitting the spatially structured light onto the multilayered sample, detecting diffracted spatially structured light at one or more of a plurality of sensors, and estimating an overlay error of the multilayered sample based on the diffracted spatially structured light detected at the one or more of the plurality of sensors.
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HETERODYNING OPTICAL PHASE MEASURING DEVICE FOR DIFFRACTION BASED OVERLAY
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Veröffentlichung: | 2023 |
Medientyp: | Patent |
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